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In-Situ Multiprocessing of Ultrathin Silicon Nitride Capacitors for Advanced Dram Cells
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 195
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- 1994
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Advanced Dram Cell Dielectric Films using Rapid Thermal Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 342 / 1994
- Published online by Cambridge University Press:
- 22 February 2011, 305
- Print publication:
- 1994
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Influence of Surface Preparation Prior to Thermal Nitridation on the Electrical Characteristics of Silicon Nitride Films Deposited on Polycrystalline Silicon Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 51
- Print publication:
- 1992
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