3 results
Microanalysis of Tungsten Silicide/Polysilicon Interface: Effectiveness of in Situ Rie Clean on Removal of Native Oxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 182 / 1990
- Published online by Cambridge University Press:
- 21 February 2011, 89
- Print publication:
- 1990
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- Article
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Microanalysis of Tungsten Silicide/Polysilicon Interface: Effectiveness of In Situ Rie Clean on Removal of Native Oxide
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- Journal:
- MRS Online Proceedings Library Archive / Volume 181 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 193
- Print publication:
- 1990
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- Article
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Rie-Induced Damage to Single Crystal Silicon Monitored with Nondestructive Thermal Waves
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- Journal:
- MRS Online Proceedings Library Archive / Volume 68 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 387
- Print publication:
- 1986
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