2 results
Ion implantation of silicon wafers for defect-reduced doped layer formation with low dopant atom diffusion
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- Journal:
- Journal of Materials Research / Volume 9 / Issue 11 / November 1994
- Published online by Cambridge University Press:
- 03 March 2011, pp. 2987-2992
- Print publication:
- November 1994
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In Situ TEM Observation of Defects and Amorphous Phase in Si Wafer During Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 71
- Print publication:
- 1991
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