4 results
Infrared Semiconductor Laser Annealing Used for Formation of Shallow Junction
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1070 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1070-E03-04
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- 2008
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High Efficiency Crystallization of Silicon Thin Films Using Continuous Wave Infrared Laser
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- Journal:
- MRS Online Proceedings Library Archive / Volume 910 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0910-A14-02
- Print publication:
- 2006
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Laser Crystallization of Silicon Thin Films Using Photo Absorption Layer Formed by Spin Coating of Carbon Particles
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- Journal:
- MRS Online Proceedings Library Archive / Volume 958 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0958-L07-23
- Print publication:
- 2006
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