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Gallium-Induced Milling of Silicon: A Computational Investigation of Focused Ion Beams
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- Journal:
- Microscopy and Microanalysis / Volume 14 / Issue 4 / August 2008
- Published online by Cambridge University Press:
- 04 July 2008, pp. 315-320
- Print publication:
- August 2008
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- Article
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10 - Micro-machining and mask repair
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- Book:
- Focused Ion Beam Systems
- Published online:
- 12 January 2010
- Print publication:
- 13 September 2007, pp 268-294
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- Chapter
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