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Stress Characterization of Post-CMP Copper Films Planarized Using Novel Low-Shear and Surface-Engineered Pads
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W2.7
- Print publication:
- 2005
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- Article
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Optical and Nanomechanical Characterization of an Omnidirectional Reflector Encompassing 850 nm Wavelength
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- Journal:
- MRS Online Proceedings Library Archive / Volume 817 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, L5.8
- Print publication:
- 2004
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- Article
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