4 results
Expanding thermal plasma for low-k dielectrics deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E6.9
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- 2003
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Expanding Thermal Plasma Deposition of Silicon Dioxide-Like Films for Microelectronic Devices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 715 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, A19.3
- Print publication:
- 2002
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Selective Grafting of Amine Groups on Polyethylene by Means of Modulated RF NH3 Plasmas
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- Journal:
- MRS Online Proceedings Library Archive / Volume 544 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 115
- Print publication:
- 1998
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Plasma Treatment of Polymers for Improving Al Adhesion
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- Journal:
- MRS Online Proceedings Library Archive / Volume 544 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 269
- Print publication:
- 1998
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