2 results
Improved Al-Via Fill Process Technology for Sub-0.251µm Interconnect
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- Journal:
- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 437
- Print publication:
- 1999
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- Article
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Boron Induced Changes in the Structural Properties of Amorphous Silicon Boron Alloys
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- Journal:
- MRS Online Proceedings Library Archive / Volume 403 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 369
- Print publication:
- 1995
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- Article
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