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Mechanical Characterization of Interfacial Adhesion in Elastomeric Material for Microelectronic Device through JKR Model Combined with Micro-to-Nano IIT
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1159 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1159-G06-05
- Print publication:
- 2009
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- Article
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