4 results
Laser-Assisted TiSi2 Formation for ULSI Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 470 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 265
- Print publication:
- 1997
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Shallow Junction Formation in Silicon: Dopant Incorporation and Diffusion Through Tungsten Silicide Films Using Gas Immersion Laser Doping (Gild)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 260 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 673
- Print publication:
- 1992
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Nanosecond Thermal Processing for Ultra-High-Speed Device Technology
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- Journal:
- MRS Online Proceedings Library Archive / Volume 158 / 1989
- Published online by Cambridge University Press:
- 21 February 2011, 241
- Print publication:
- 1989
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Pulsed Laser Crystallization of GexSi1−x Alloy Films on Si(100) Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 102 / 1987
- Published online by Cambridge University Press:
- 26 February 2011, 323
- Print publication:
- 1987
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