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Wafer-Scale, Highly-Ordered Silicon Nanowires Produced by Step-and-Flash Imprint Lithography and Metal-Assisted Chemical Etching
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1512 / 2013
- Published online by Cambridge University Press:
- 20 December 2012, mrsf12-1512-ff08-02
- Print publication:
- 2013
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- Article
- Export citation