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Double-layered Structure of Surface Modification of Low-k Dielectrics Induced by He Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 863 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, B2.3
- Print publication:
- 2005
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Fibrous structures on diamond and carbon surfaces formed by hydrogen plasma under direct-current bias and field electron-emission properties
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- Journal:
- Journal of Materials Research / Volume 18 / Issue 2 / February 2003
- Published online by Cambridge University Press:
- 31 January 2011, pp. 305-326
- Print publication:
- February 2003
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- Article
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