1 results
Three-Dimensional Semiconductor Device Investigation Using Focused Ion Beam and Scanning Electron Microscopy Imaging (FIB/SEM Tomography)
-
- Journal:
- Microscopy and Microanalysis / Volume 19 / Issue 1 / February 2013
- Published online by Cambridge University Press:
- 25 January 2013, pp. 85-92
- Print publication:
- February 2013
-
- Article
- Export citation