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Growth and Stress Characterization of LPCVD SiC Films Deposited on Bare, Carbonized and Oxidized Si(001) Substrates
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- Journal:
- MRS Online Proceedings Library Archive / Volume 555 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 173
- Print publication:
- 1998
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- Article
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