2 results
Methods to Measure Mechanical Properties of NEMS and MEMS: Challenges and Pitfalls
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1185 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1185-II04-06
- Print publication:
- 2009
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- Article
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High-Q integrated RF passives and RF-MEMS on silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 783 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, B3.1
- Print publication:
- 2003
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- Article
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