2 results
Effects of an Al2O3 capping layer on La2O3 deposited by remote plasma atomic layer deposition
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- Journal:
- Journal of Materials Research / Volume 25 / Issue 10 / October 2010
- Published online by Cambridge University Press:
- 31 January 2011, pp. 1898-1903
- Print publication:
- October 2010
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Epitaxial CoSi2 formation using an oxynitride buffer layer
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- Journal:
- Journal of Materials Research / Volume 24 / Issue 8 / August 2009
- Published online by Cambridge University Press:
- 31 January 2011, pp. 2705-2710
- Print publication:
- August 2009
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