1 results
Effects of Arsenic Segregation and Electron Trapping on the Capacitance-Voltage Behavior of Polysilicon and Polycide Gates
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 182 / 1990
- Published online by Cambridge University Press:
- 21 February 2011, 195
- Print publication:
- 1990
-
- Article
- Export citation