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Rapid Thermal Processing of Gate Dielectric Films and their Characterization
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- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 127
- Print publication:
- 1987
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Material and Electrical Properties of Gate Dielectrics Grown by Rapid Thermal Processing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 52 / 1985
- Published online by Cambridge University Press:
- 26 February 2011, 341
- Print publication:
- 1985
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- Article
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