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Chromium-Polyimide Interface Chemistry
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- Journal:
- MRS Online Proceedings Library Archive / Volume 108 / 1987
- Published online by Cambridge University Press:
- 21 February 2011, 225
- Print publication:
- 1987
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Anisotropic Dry Etching of S1O2 on Si and its Impact on Surface and Near-Surface Properties of the Substrate.
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- Journal:
- MRS Online Proceedings Library Archive / Volume 68 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 367
- Print publication:
- 1986
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- Article
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