3 results
Thermally Grown and Reoxidized Nitrides as Alternative Gate Dielectrics
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 786 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E3.14
- Print publication:
- 2003
-
- Article
- Export citation
Dry Hydrogen Plasma Cleaning for Local Epitaxial Growth
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 315 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 91
- Print publication:
- 1993
-
- Article
- Export citation
Single Step Low Temperature In-Situ Substrate Cleaning for Silicon Processing
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 259 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 249
- Print publication:
- 1992
-
- Article
- Export citation