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Precipitates Caused in Silicon Wafers by Prolonged High-Temperature Annealing in Nitrogen Atmosphere
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1591 / 2014
- Published online by Cambridge University Press:
- 17 March 2014, jsapmrs13-1591-6046
- Print publication:
- 2014
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- Article
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Room Temperature Process for Chemical Vapor Deposition of Amorphous Silicon Carbide Thin Film Using Monomethylsilane Gas
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1433 / 2012
- Published online by Cambridge University Press:
- 13 June 2012, mrss12-1433-h04-01
- Print publication:
- 2012
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- Article
- Export citation