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Determination of Space Shift of Si / SiGe / Si Heterojunction's Cap Layer by Grazing-angle Incidence X-ray Backiffraction Technique
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- Journal:
- MRS Online Proceedings Library Archive / Volume 768 / 2003
- Published online by Cambridge University Press:
- 10 February 2011, G3.1
- Print publication:
- 2003
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- Article
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Grazing-angle Incidence X-ray Diffraction by the Si1-α(x)-β(x)Geβ(x)Cβ(x)/Si Heterojunction where the Germanium and the Carbon Concentrations are Periodically Varying along the Flat Layer Surface
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B4.31
- Print publication:
- 2002
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- Article
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