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Surface Chemistry of Boron-Doped SiO2 CVD: Enhanced Uptake of Tetraethyl Orthosilicate by Hydroxyl Groups Bonded to Boron
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- Journal:
- MRS Online Proceedings Library Archive / Volume 334 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 57
- Print publication:
- 1993
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- Article
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