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TEM Study of the Damage Profiles induced by 14 keV P+ Implantation in Silicon and Germanium
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- Journal:
- Microscopy and Microanalysis / Volume 13 / Issue S02 / August 2007
- Published online by Cambridge University Press:
- 05 August 2007, pp. 654-655
- Print publication:
- August 2007
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- Article
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