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A Compact Planar Magnetron Plasma Sputtering Device for TiO2 Deposition – ERRATUM
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1601 / 2014
- Published online by Cambridge University Press:
- 27 March 2014, e4
- Print publication:
- 2014
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- Article
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A Compact Planar Magnetron Plasma Sputtering Device for TiO2 Deposition
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 1601 / 2014
- Published online by Cambridge University Press:
- 29 November 2013, jsapmrs-13-1601
- Print publication:
- 2014
-
- Article
- Export citation