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Planarization Specification for 22nm and Beyond BEOL CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1249 / 2010
- Published online by Cambridge University Press:
- 01 February 2011, 1249-E01-04
- Print publication:
- 2010
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- Article
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Porous Silica Xerogel Processing And Integration For Ulsi Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 511 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 213
- Print publication:
- 1998
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- Article
- Export citation