3 results
Design and Performance of a Microengine Realized with Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators
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- Journal:
- MRS Online Proceedings Library Archive / Volume 741 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, J5.3
- Print publication:
- 2002
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Surface Micromachined Polysilicon Components Containing Continuous Hinges and Microrivets Used to Realize Three-Dimensional MEMS Structures
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- Journal:
- MRS Online Proceedings Library Archive / Volume 687 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, B5.1
- Print publication:
- 2001
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Epoxy Cure Monitoring With An Interdigitated Gate Electrode Field Effect Transistor (IGEFET)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 503 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 93
- Print publication:
- 1997
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