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Characterization of Boron Carbo-Nitride Films Deposited By Low Temperature Chemical Vapor Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 766 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, E8.21
- Print publication:
- 2003
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- Article
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Low Temperature Tungsten, Tungsten Carbide and Tantalum Carbide Film Growth
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- Journal:
- MRS Online Proceedings Library Archive / Volume 648 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, P6.43
- Print publication:
- 2000
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- Article
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