4 results
Grain Structure Interaction Between Cold and Hot Sputtered Aluminum Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 229 / 1991
- Published online by Cambridge University Press:
- 15 February 2011, 281
- Print publication:
- 1991
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The Deposition of Borophosphosilicate Glass Films by LPCVD Using 2,4,6,8 Tetramethylcyclotetrasiloxane
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- Journal:
- MRS Online Proceedings Library Archive / Volume 204 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 533
- Print publication:
- 1990
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The LPCVD of Silicon Nitride Films from Alkylazidosilanes
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- Journal:
- MRS Online Proceedings Library Archive / Volume 204 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 515
- Print publication:
- 1990
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Diethylsilane as a Silicon Source for the Deposition of Silicon Nitride and Silicon Oxynitride Films by LPCVD
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- Journal:
- MRS Online Proceedings Library Archive / Volume 204 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 509
- Print publication:
- 1990
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