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Comparison of hydrophilic properties of amorphous TiOx films obtained by radio frequency sputtering and plasma-enhanced chemical vapor deposition
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- Journal:
- Journal of Materials Research / Volume 16 / Issue 2 / February 2001
- Published online by Cambridge University Press:
- 31 January 2011, pp. 621-626
- Print publication:
- February 2001
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- Article
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