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Microstructural Evaluation of Degradation Mechanisms in Thermally Treated TaSiN Diffusion Barriers for Cu Interconnects
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- Journal:
- Microscopy and Microanalysis / Volume 10 / Issue S02 / August 2004
- Published online by Cambridge University Press:
- 01 August 2004, pp. 616-617
- Print publication:
- August 2004
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- Article
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Microstructure and degradation mechanisms of TaSiN diffusion barriers for Cu interconnects
-
- Journal:
- Microscopy and Microanalysis / Volume 9 / Issue S03 / September 2003
- Published online by Cambridge University Press:
- 05 September 2003, pp. 248-249
- Print publication:
- September 2003
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- Article
- Export citation