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Modeling of Polishing Regimes in Chemical Mechanical Polishing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 867 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, W5.9
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- 2005
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Engineering the Interaction Forces to Optimize CMP Performance
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- Journal:
- MRS Online Proceedings Library Archive / Volume 732 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, I3.5
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- 2002
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Surface-particle interactions in the chemical mechanical polishing process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 501 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 387
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- 1997
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