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Kinetic analysis and correlation with residual stress of the Ni/Si system in thin film
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- Journal:
- MRS Online Proceedings Library Archive / Volume 875 / 2005
- Published online by Cambridge University Press:
- 01 February 2011, O14.5
- Print publication:
- 2005
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Floating Temperature Deposition of Device Quality SiO2 Thin Films by DECR Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 181
- Print publication:
- 1992
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