1 results
Influence of Surface Preparation Prior to Thermal Nitridation on the Electrical Characteristics of Silicon Nitride Films Deposited on Polycrystalline Silicon Films
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 51
- Print publication:
- 1992
-
- Article
- Export citation