2 results
The Effect of Sputtering Gas on the Materials and Electrical Characteristics of p-Si Films Formed by DC Magnetron Sputtering
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 685 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, D7.3.1
- Print publication:
- 2001
-
- Article
- Export citation
Co-Optimization of Si Thin-Film Deposition and Excimer Laser Anneal Processes for Fabrication of High-Performance p-Si TFTs
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 508 / January 1998
- Published online by Cambridge University Press:
- 10 February 2011, 67
- Print publication:
- January 1998
-
- Article
- Export citation