1 results
High-Quality Boron and BF2+-Implanted P+ Junctions in Si Using Solid Phase Epitaxy and Transient Annealing
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 35 / 1984
- Published online by Cambridge University Press:
- 25 February 2011, 367
- Print publication:
- 1984
-
- Article
- Export citation