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Hyrogenated Amorphous Silicon with High Growth Rate, Gas Utilization and Homogeneous Deposition by Amplitude Modulated Vhf-Pecvd for Solar Cell Application
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- Journal:
- MRS Online Proceedings Library Archive / Volume 715 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, A6.6
- Print publication:
- 2002
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- Article
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