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Large Area Mems: Materials Issues and Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 685 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, D2.5.1
- Print publication:
- 2001
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Chemistry of SiO2 Plasma Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 204 / 1990
- Published online by Cambridge University Press:
- 25 February 2011, 475
- Print publication:
- 1990
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- Article
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Plasma Chemistry Control of Silicon Nitride Deposition
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- Journal:
- MRS Online Proceedings Library Archive / Volume 118 / 1988
- Published online by Cambridge University Press:
- 26 February 2011, 107
- Print publication:
- 1988
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Chemistry of Nitrogen-Silane Plasmas
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- Journal:
- MRS Online Proceedings Library Archive / Volume 131 / 1988
- Published online by Cambridge University Press:
- 25 February 2011, 301
- Print publication:
- 1988
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