A series of sol-gel derived CaTiO3- PbTiO3 thin films ( i.e. Pb1−xCaxTiO3 with x = 0 − 1) was prepared on platinized Si substrates and fired to temperatures ranging from 550C to 650C. Multiple spincoating was performed to obtain films up to 0.5 μm thick with an intermediate firing of 400C between coatings. After the final crystallization firing, top Pt electrodes were sputtered to form monolithic capacitors. These capacitors were subjected to dielectric and ferroelectric characterization using an impedance analyzer and Radiant Technology RT66A Ferroelectric Test System. XRD was used to study the phase development and phase assembly of the fired films. All compositions were single perovskite phase after firing to 600C. The effects of Ca content on the crystallization behavior and ferroelectric properties are discussed.

Scanning Force Microscopy (SFM) has been used for the determination of friction, phase transformation, piezoelectric behavior (contact mode), polarization state and dielectric constant (non contact mode) in several nanometer regions of Lead Zirconate Titanate (PZT) films. The use of the SFM tip, in the contact mode, to polarize different nanoregions of the film and to apply an oscillating field thereon, led to effective piezoelectric coefficients and piezoelectric loops. In the non-contact mode, application of an ac signal (frequency ω) to the tip-electrode system produced an oscillation of the tip at ω (fundamental or first harmonic) and 2ω (second harmonic). The signals ω and 2ω were related to the state of polarization and the dielectric constant of the film. Analysis of the combined contact, non-contact and friction force microscopic data have provided considerable insight into the piezoelectricity and polarization in the nanodomains.