Hostname: page-component-848d4c4894-8kt4b Total loading time: 0 Render date: 2024-07-07T11:07:39.385Z Has data issue: false hasContentIssue false

Thermal Annealing of InGaN/GaN Strained-Layer Quantum Well

Published online by Cambridge University Press:  15 February 2011

Michael C.Y. Chan
Affiliation:
Department of Electrical & Electronic Engineering, University of Hong Kong, Pokfulam, Hong Kong, [email protected]
Kwok-On Tsang
Affiliation:
Department of Electrical & Electronic Engineering, University of Hong Kong, Pokfulam, Hong Kong, [email protected]
E. Herbert Li
Affiliation:
Department of Electrical & Electronic Engineering, University of Hong Kong, Pokfulam, Hong Kong, [email protected]
Steven P. Denbaars
Affiliation:
Electrical and Computer Engineering and Materials Departments, University of California, Santa Barbara, CA 93106
Get access

Abstract

Quantum well (QW) material engineering has attracted a considerable amount of interest from many people because of its ability to produce a number of optoelectronic devices. QW composition intermixing is a thermal induced interdiffusion of the constituent atoms through the hetero-interface. The intermixing process is an attractive way to achieve the modification of the QW band structure. It is known that the band structure is a fundamental determinant for such electronic and optical properties of materials as the optical gain, the refractive index and the absorption. During the process, the as-grown square-QW compositional profile is modified to a graded profile, thereby altering the confinement profile and the subband structure in the QW. The blue-shifting of the wavelength in the intermixed QW structure is found in this process.

In recent years, III-nitride semiconductors have attracted much attention. This is mainly due to their large bandgap range from 1.89eV (wurtzite InN) to 3.44eV (wurtzite GaN). InGaN/GaN quantum well structures have been used to achieve high lumens blue and green light emitting diodes. Such structures also facilitate the production of full colour LED displays by complementing the colour spectrum of available LEDs.

In this paper, the effects of thermal annealing on the strained-layer InGaN/GaN QW will be presented. The effects of intermixing on the confinement potential of InGaN/GaN QWs have been theoretically analysed, with sublattices interdiffusion as the basis. This process is described by Fick's law, with constant diffusion coefficients in both the well and the barrier layers. The diffusion coefficients depend on the annealing temperature, time and the activation energy of constituent atoms. The optical properties of intermixed InGaN/GaN QW structure of different interdiffusion rates have been theoretically analyzed for applications of novel optical devices. The photoluminescence studies and the intermixed QW modeling have been used to understand the effects of intermixing.

Type
Research Article
Copyright
Copyright © Materials Research Society 1999

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Nakamura, S., IEEE J. Selected Topics Quantum Electron. 3, 712 (1997).Google Scholar
2. Mack, M. P., Abare, A. C., Kozodoy, P., Hanson, M., Keller, S., Mishra, U. K, Coldren, L. A., Denbaars, S. P., institute of physics conference series, 156, 367 (1998)Google Scholar
3. Mack, M. P., Abare, A. C., Hansen, M., Kozodoy, P., Keller, S., Mishra, U., Coldren, L. A., Denbaars, S. P., J. of crystal growth, 190, 837 (1998)Google Scholar
4. Li, E.H., Editor, Quantum Well Mixing and Optoelectronic Device Applications, Milestone Series, vol. 145.Google Scholar
5. McCluskey, M. D., Romano, L. T., Krusor, B. S., Johnson, N. M., Suski, T., and Jun, J., Appl. Phys. Lett. 73, 1281 (1998)Google Scholar
6. Chuang, S. L. and Chang, C. S., Semicond. Sci. Technol. 12, 252 (1997).Google Scholar
7. Yuan, S., Kim, Y., Jagadish, C., Burke, P. T., Gal, M., Zou, J., Cai, D. Q., Cockayne, D. J. H., and Cohen, R. M., Appl. Phys. Lett. 70, 1269 (1997).Google Scholar
8. Burkner, S., Maier, M., Larkins, E. C., Rothemound, W., O'Reilly, E. P., and Ralston, J. D., J. Electronic Materials 24, 805 (1995).Google Scholar
9. , Gontijo, Krauss, T., Marsh, J. H., and Rue, R. M. De La, IEEE J. Quantum Electron. 30, 189 (1994).Google Scholar
10. Lambrecht, Walter R. L., Solid-State Electron. 41, 195 (1997).Google Scholar
11. Smith, M., Lin, J. Y., Jiang, H. X., Khan, A., Chen, Q., Salvador, A., Botchkarev, A., Kim, W., and Morkoc, H., Appl. Phys. Lett. 70, 2882 (1997)Google Scholar