Hostname: page-component-7479d7b7d-68ccn Total loading time: 0 Render date: 2024-07-15T21:44:27.511Z Has data issue: false hasContentIssue false
  • English
  • Français

Terraced Copper Growth Deposited Onto Teflon AF1600 by The Excimer Laser Irradiation of Cu(hfac)Tmvs

Published online by Cambridge University Press:  15 February 2011

D. Popovici ,
K. Piyakis ,
E. Sacher  and
M. Meunier
D. Popovici
Affiliation:
Groupe de recherche en physique et technologie des couches minces (GCM) and Département de génie physique, École Polytechnique, C. P. 6079, Succursale Centre-ville, Montréal, Québec, H3C3A7.
K. Piyakis
Affiliation:
Groupe de recherche en physique et technologie des couches minces (GCM) and Département de génie physique, École Polytechnique, C. P. 6079, Succursale Centre-ville, Montréal, Québec, H3C3A7.
E. Sacher
Affiliation:
Groupe de recherche en physique et technologie des couches minces (GCM) and Département de génie physique, École Polytechnique, C. P. 6079, Succursale Centre-ville, Montréal, Québec, H3C3A7.
M. Meunier
Affiliation:
Groupe de recherche en physique et technologie des couches minces (GCM) and Département de génie physique, École Polytechnique, C. P. 6079, Succursale Centre-ville, Montréal, Québec, H3C3A7.
Get access

Abstract

The laser chemical vapour deposition (LCVD) of the organometallic precursor Cu(hfac)TMVS (hexafluoroacetylacetonate)(trimethylvinylsilane) is used to grow copper films on a Teflon AF1600 substrate. Exposure to excimer laser radiation at 248 nm results in a terraced copper growth. A simple model, based on interference effects in the Teflon and copper layers, is presented to account for this structure.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 397: Symposium B – Advanced laser Processing of Materials-Fundamentals and Applications , 1995 , 643
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1 Sacher, E., Prog. Surf. Sci., 47, 273 (1994).Google Scholar
2 Shingubara, S., Nakasaky, Y., Kaneko, H., Appl. Phys. Lett., 58 42 (1991).Google Scholar
3 Girolami, G., Jeffries, P.M., Dubois, H.L., J. Am. Chem. Soc., 115, 1055 (1993).Google Scholar
4 Murarka, S.P., Gutman, R.J., Thin Solid Films, 236, 257 (1993).Google Scholar
5 Izquierdo, R., Bertomeu, J., Suys, M., Sacher, E., Meunier, M., Appl Surf Sci, 86, 509 (1995).Google Scholar
6 DuPont Specialty Polymers, technical information bulletins H-16577-1 and H-52454Google Scholar
7 Ehrlich, D. J. and Tsao, J. Y., “Laser Microfabrication”, Academic Press Inc., (1989), p. 59.Google Scholar
8 Brueck, S. R. and Ehrlich, D. J., Phys. Rev. Lett., 48, 1678, (1982)Google Scholar
9 Bom, M. and Wolf, E., “Principless of optics”, NY, Pergamon Press, (1965), p. 627 Google Scholar