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Research on Amorphous Silicon Thin-Film Structure and Growth Processes Using Nonlinear Dynamics Methods

Published online by Cambridge University Press:  01 February 2011

Nikolay Viktorovich Bodyagin ,
Sergey Pavlovich Vikhrov ,
Tatiana Gennadievna Larina  and
Stanislav Mursalovich Mursalov
Sergey Pavlovich Vikhrov
Affiliation:
[email protected], Ryazan State Radioengineering University, Chare of Biomedical and Semiconductor Electronics, 59/1 Gagarina st., Ryazan, N/A, 390005, Russian Federation
Tatiana Gennadievna Larina
Affiliation:
[email protected] State Radioengineering UniversityChare of Biomedical and Semiconductor Electronics59/1 Gagarina st.RyazanN/A390005Russian Federation
Stanislav Mursalovich Mursalov
Affiliation:
[email protected], Ryazan State Radioengineering University, Chare of Biomedical and Semiconductor Electronics, 59/1 Gagarina st., Ryazan, N/A, 390005, Russian Federation
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Abstract

There proved a possibility of applying the self-organization theory to the growth of noncrystalline thin-films and to the detection of ordering in their structure. Methods of analyzing the dynamics of complex systems are modified so as to investigate the structure of noncrystalline thin films. There offered new principles of the construction of material growth control systems.

Keywords

amorphousfilmnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 910: Symposium A – Amorphous and Polycrystalline Thin-Film Silicon Science and Technology – 2006 , 2006 , 0910-A05-01
Copyright
Copyright © Materials Research Society 2006

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References

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