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Preparation of PZT/YBCO/YAIO Heterostructure Thin Films by KrF Excimer Laser Ablation

Published online by Cambridge University Press:  15 February 2011

Kenji Ebihara ,
Hiromnitsu Kurogi ,
Yukihiko Yamagata ,
Tomoaki Ikegami  and
Alexander M. Grishin
Kenji Ebihara
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami, Kumamoto 860, Japan. E-mail: [email protected]
Hiromnitsu Kurogi
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami, Kumamoto 860, Japan. E-mail: [email protected]
Yukihiko Yamagata
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami, Kumamoto 860, Japan. E-mail: [email protected]
Tomoaki Ikegami
Affiliation:
Department of Electrical and Computer Engineering, Kumamoto University, Kurokami, Kumamoto 860, Japan. E-mail: [email protected]
Alexander M. Grishin
Affiliation:
Department of Condensed Matter Physics, Royal Institute of Technology, S-100 44, Stockholm, Sweden
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Abstract

The perovskite oxide YBa2Cu3O7-x (YBCO) and Pb(ZrxTi1-x)O3 (PZT) thin films have been deposited for superconducting-ferroelectric devices. KrF excimer laser ablation technique was used at the deposition conditions of 200-600mTorr O2, 2-3J/cm2 and 5-10 Hz operation frequency. Heterostructures of PZT-YBCO-YAlO3:Nd show the zero resistivity critical temperature of 82K and excellent ferroelectric properties of remnant polarization 32 μC/cm2, coercive force of 80kV/cm and dielectric constant 800. Cycling fatigue characteristics and leakage current are also discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 526: Symposium Y – Advances in Laser Ablation of Materials , 1998 , 193
Copyright
Copyright © Materials Research Society 1998

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References

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