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Polycrystalline Silicon as a Mechanical Material
Published online by Cambridge University Press: 21 February 2011
Abstract
In 1982, Kurt Petersen published “Silicon as a Mechanical Material” in the Proceedings of the IEEE. This thorough review article heightened focus on the advantages of utilizing the mechanical as well as electrical properties of single-crystal silicon. Processes for shaping single-crystal silicon based upon selective etching were shown in the article to make silicon useful for a variety of miniature mechanical devices.
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- Copyright © Materials Research Society 1990