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Passivation of N-Type Silicon by Hydrogen
Published online by Cambridge University Press: 26 February 2011
Abstract
Infrared spectroscopy has been used to study hydrogen passivation of P, As, and Sb donors in Si. The spectra show several new absorption bands due to donor-H complexes. By comparing spectra after different heat treatments it is shown directly that the passivation is due to complex formation.
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- Copyright © Materials Research Society 1988
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Permanent Address: Dept. of Solid State Physics, Univ. of Lund, Box 118, S-221 00 Lund, Sweden
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