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Mechanical Behavior of Benzocyclobutene Films on Silicon Substrates
Published online by Cambridge University Press: 26 February 2011
Abstract
The evolution of the stress in coatings derived from divinylsiloxane bisbenzocyclobutene, mixed stereo and positional isomers of 1,3-bis(2-bicyclo[4.2.0]octa-1,3,5-trien-3-ylethenyl)-1,1,3,3-tetramethyl disiloxane (CAS 117732-87-3), has been measured on silicon substrates with an optically levered beam during thermal cycles. The stress at room temperature in gelled coatings varies between ca. 15 MPa and 45 MPa depending on the cure schedule. The progression of the polymer's glass transition temperature is correlated with the evolution of the structural state observed with FTIR. A method is presented for predictably controlling substrate curvature during multilayer processing.
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- Copyright © Materials Research Society 1991
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