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Elemental Mapping by Energy-Filtered Electron Microscopy

Published online by Cambridge University Press:  21 February 2011

Ondrej L. Krivanek ,
Michael K. Kundmann  and
Xavier Bourrat
Ondrej L. Krivanek
Affiliation:
Gatan Research and Development, 6678 Owens Drive, CA 94588, USA
Michael K. Kundmann
Affiliation:
Gatan Research and Development, 6678 Owens Drive, CA 94588, USA
Xavier Bourrat
Affiliation:
LCTS, CNRS-SEP-UB 1, 3 Allée de la Boëtie, 33600 Pessac, FRANCE
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Abstract

Energy-filtered imaging in a transmission electron microscope provides a fast and quantitative technique for mapping the distribution of elements in solids at nm-level resolution. The technique and its instrumental requirements are reviewed, and illustrated in the context of materials science.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 332: Symposium U – Determining Nanoscale Physical Properties of Materials by Microscopy and Spectroscopy , 1994 , 341
Copyright
Copyright © Materials Research Society 1994

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References

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