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Dangling-Bond Relaxation and Metastability in P-Type Hydrogenated Amorphous Silicon
Published online by Cambridge University Press: 15 February 2011
Abstract
We discuss the subtle effects involved in observing slow dangling bond relaxation by studying capacitance transients in p-type hydrogenated amorphous silicon (a-Si:H). The data suggest that neutral dangling bonds are reversibly converted into metastable positive charged dangling bonds by hole trapping. These metastable positive dangling bonds reconvert to neutral dangling bonds upon annealing at elevated temperature. The annealing kinetics for this process are the same as those observed for annealing of quenched in conductivity changes in p-type a-Si:H.
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- Copyright © Materials Research Society 1995