Hostname: page-component-848d4c4894-2xdlg Total loading time: 0 Render date: 2024-07-02T15:23:12.806Z Has data issue: false hasContentIssue false
  • English
  • Français

Chemical Vapor Deposition of Multiphase Boron-Carbon-Silicon Ceramics

Published online by Cambridge University Press:  15 February 2011

E. Michael Golda  and
B. Gallois
E. Michael Golda
Affiliation:
Department of Materials Science and EngineeringStevens Institute of Technology, Hoboken, NJ, 07030.
B. Gallois
Affiliation:
Department of Materials Science and EngineeringStevens Institute of Technology, Hoboken, NJ, 07030.
Get access

Abstract

Specific compositions of boron-carbon-silicon ceramics exhibit improved abrasive wear and good thermal shock resistance, but require bulk sintering at temperatures in excess of 2100K. The formation of such phases by chemical vapor deposition was investigated in the temperature range of 1073K–1573K. Methyltrichlorosilane (CH3SiCl3), boron trichloride, and methane were chosen as reactant gases, with hydrogen as a carrier gas and diluent. The coatings were deposited in a computer-controlled, hot-wall reactor at a pressure of 33 MPa (200 Torr).

Below 1473K the coatings were amorphous. At higher temperatures non-equilibrium reactions controlled the deposition process. The most common coating consisted of a silicon carbide matrix and a silicon boride, SiB6, dispersed phase. Multiphase coatings of B+B4C+SiB6 and SiC+SiB6+SiB14 were also deposited by controlling the partial pressure of methane and boron trichloride. Non-equilibrium thermodynamic analysis qualitatively predicted the experimentally deposited multiphase coatings.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 250: Symposium R – Chemical Vapor Deposition of Refractory Metals and Ceramics II , 1991 , 167
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Holleck, H., J. Vac. Sci. Technol., A4(6), 2661–2669 (1986)CrossRefGoogle Scholar
2. Samasov, G.V., et al., Boron. Its Compounds and Alloys, AECtr-5032 (Book 1), The Academy of Sciences of the Ukranian S.S.R. (1960)Google Scholar
3. Niemyski, T., Appenheimer, S., Panczyk, J. and Badzian, A., J. Crystal Growth, 5, 401–404 (1969)CrossRefGoogle Scholar
4. Motojima, S., Yagi, H. and Iwamori, N., J. Materials Science Letters, 5, 13–15 (1986)CrossRefGoogle Scholar
5. Besmann, T.M., Solgasmix-PV, , A Computer Program to Calculate Equilibrium Relationships in Complex Chemical Systems, ORNL/TM-5775 (Oak Ridge National Laboratory, Oak Ridge, Tennessee, 1977)CrossRefGoogle Scholar
6. Chase, M.W. Jr., Davis, C.A., Downey, J.R. Jr., et al., JANAF Thermochemical Tables, 3rd Edition, J. of Phys. And Chem. Ref. Data, 14, (1985)Google Scholar
7. Dirkx, R.R. and Spear, K.E., Calphad, 1987, 167–175CrossRefGoogle Scholar
8. Spear, K.E., Pure and Appl. Chem., 54(7), 1297–1311 (1982)CrossRefGoogle Scholar
9. Fischman, G. and Petuskey, W.T., J. Am. Ceram. Soc., 68(4), 185–190 (1985)CrossRefGoogle Scholar
10. Back, M.H. and Back, R.A., in Thermal Decomposition and Reactions of Methanein Pyrolysis:Industrial Theory and Practice, edited by Albright, L.F., Crynes, B.L. and Corcoran, W.H. (Academic Press, New York, 1983)Google Scholar
11. Cagliostro, D.E. and Riccitiello, S.R., J. Am. Ceram. Soc., 73(3), 607–614 (1990)CrossRefGoogle Scholar