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a-SiN:H Thin Film Diode for Digital Radiography

Published online by Cambridge University Press:  17 March 2011

I.A. Popov ,
G. Van Doorselaer ,
A. Van Calster ,
H. De Smet ,
J. De Baets ,
F. Callens  and
E. Boesman
J. De Baets
Affiliation:
ELIS-TFCG/IMEC, University of Ghent, Ghent, Belgium
E. Boesman
Affiliation:
CSSS, University of Ghent, Ghent, Belgium
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Abstract

Recent developments in the area of cost effective 2D direct x-ray sensor arrays on the base of a-SiN:H back-to-back Schottky diodes and no switching devices per pixel are presented. Discussion focuses on two major aspects: (i) x-ray sensitivity of the sensor itself and possibility of its improvement; (ii) the overall performance of the sensor array.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 609: Symposium A – Amorphous & Heterogeneous Silicon Thin Films – 2000 , 2000 , A12.9
Copyright
Copyright © Materials Research Society 2000

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References

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